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The super-resolution lithography equipment project can process 22-nanometer chips through national acceptance – China Daily News




The super-resolution lithographic equipment project can process 22-nanometer chips through national acceptance

China Daily, November 30 (Reporter Zhang Zhihao) On November 29, the National Development Project of Scientific Research Equipment "Development of Super Resolution Lithographic Equipment" adopted on 29th. The lithographic machine was developed by the Institute of Optical-Electronic Technology of the Chinese Academy of Sciences, lithography …

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